@article { , title = {Effect of tungsten doping on the properties of In2O3 films.}, abstract = {Highly crystalline tungsten oxide (WO3)-doped indium oxide (In2O3) films are synthesized at room temperature by the RF magnetron sputtering technique. The structural and morphological properties of the as-deposited films and the films annealed at a temperature of 300°C are investigated in detail. X-ray diffraction analysis reveals the presence of a cubic bixbyite structure with preferred orientation along the (222) plane for both the as-deposited and annealed films. Moderate WO3 doping (1 wt.\%) enhances the crystallinity of the as-deposited In2O3 films, whereas the crystallinity of the films systematically decreases with an increase in WO3 doping concentration beyond 1 wt.\%. Raman spectral analysis discloses the modes of the cubic bixbyite In2O3 phase in the films. Atomic force microscopy micrographs show a smooth and dense distribution of smaller grains in the films. X-ray photoelectron spectroscopy reveals the existence of W5+ in the doped films. The undoped film is highly oxygen deficient. Variation in the concentration of oxygen vacancy can be associated with the degree of crystallinity of the films.}, doi = {10.1007/s11837-019-03426-7}, eissn = {1543-1851}, issn = {1047-4838}, issue = {5}, journal = {JOM}, note = {INFO COMPLETE (Checked 27/5/2019 LM -- Article in Press 17/8/2019 -- Info via Scopus alert 4/4/2019 LM) PERMISSION GRANTED (version = AAM; embargo = 12 months; licence = BY-NC; SHERPA = http://sherpa.mimas.ac.uk/romeo/issn/1047-4838/ ) DOCUMENT RECEIVED (AAM rec'd 24/5/2019 LM -- Chased again 24/5/2019, 14/5/2019 LM -- AAM chased 6/5/2019 LM -- AAM requested from contact 18/4/2019 LM)}, pages = {1885-1896}, publicationstatus = {Published}, publisher = {Springer}, url = {https://rgu-repository.worktribe.com/output/238133}, volume = {71}, keyword = {Metal oxide materials, Nanoscale devices, Indium oxide, Thin films, Tungsten}, year = {2019}, author = {Krishnan, R. Reshmi and Kavitha, V.S. and Chalana, S.R. and Prabhu, Radhakrishna and Pillai, V.P. Mahadevan} }