HUO, D., LIN, C., CHOONG, Z.J., PANCHOLI, K. and DEGENAAR, P. 2015. Surface and subsurface characterisation in micro-milling of monocrystalline silicon. International journal of advanced manufacturing technology [online], 81(5-8), pages 1319-1331. Available from: https://doi.org/10.1007/s00170-015-7308-7