The construction of an ellipsometer to measure the refractive index and thickness of thin films.

Dick, David Allan

Abstract

The ellipsometer, like all precision optical instruments, is a delicate piece of equipment requiring care in its construction, maintenance and operation. Since multiple reflections and birefringence in the optical components introduce large instrumental errors, a correct choice of component parts must be made so as to minimise these effects. This thesis is an account of the construction of an ellipsometer for use in measuring the thickness and refractive index of thin dielectric films. An attempt has been made to rationalise the mathematical approach and to present a valid method for the evaluation of results. The first Chapter is a general introduction to methods for measuring the thickness and/or refractive index of thin films and surfaces. Chapter 2 develops the fundamental equation of ellipsometry from the problem of reflection and refraction of light at a boundary between two homogeneous, isotropic media, and reflection from a film-covered surface. The construction and choice of components for the ellipsometer is outlined in Chapter 3 while in Chapter 4 the alignment of the instrument and the various components, is discussed. Chapter 5 introduces the relationship between the parameters of ellipsometry and presents various data handling methods as well as the computer program used in this thesis. An evaluation of the instrument is given in Chapter 6 with actual results taken using the instrument and the order of accuracy found.

Citation

DICK, D.A. 1975. The construction of an ellipsometer to measure the refractive index and thickness of thin films. Robert Gordon's Institute of Technology, MPhil thesis. Hosted on OpenAIR [online]. Available from: https://doi.org/10.48526/rgu-wt-1993264

• Thesis Type: Thesis
• Deposit Date: Oct 22, 2024
• Publicly Available Date: Oct 22, 2024
• DOI: https://doi.org/10.48526/rgu-wt-1993264
• Public URL: https://rgu-repository.worktribe.com/output/1993264
• Award Date: Sep 30, 1975