Surface and subsurface characterisation in micro-milling of monocrystalline silicon.
(2015)
Journal Article
HUO, D., LIN, C., CHOONG, Z.J., PANCHOLI, K. and DEGENAAR, P. 2015. Surface and subsurface characterisation in micro-milling of monocrystalline silicon. International journal of advanced manufacturing technology [online], 81(5-8), pages 1319-1331. Available from: https://doi.org/10.1007/s00170-015-7308-7
This paper presents an experimental investigation on surface and subsurface characterisation of micro-machined single-crystal silicon with (100) orientation. Full immersion slot milling was conducted using solid cubic boron nitride (CBN) and diamond-... Read More about Surface and subsurface characterisation in micro-milling of monocrystalline silicon..