Recent developments in mechanical ultraprecision machining for nano/micro device manufacturing.
(2024)
Journal Article
OLANIYAN, T., FAISAL, N. and NJUGUNA, J. 2024. Recent developments in mechanical ultraprecision machining for nano/micro device manufacturing. Micromachines [online], 15(8), article number 1030. Available from: https://doi.org/10.3390/mi15081030
The production of many components used in MEMS or NEMS devices, especially those with com-plex shapes, requires machining as the best option among manufacturing techniques. Ultraprecision machining is normally employed to achieve the required shapes,... Read More about Recent developments in mechanical ultraprecision machining for nano/micro device manufacturing..