Effect of silver incorporation on the structural and morphological characteristics of RF sputtered indium oxide films.

Silpa Satheesh, B.; Kavitha, V. S.; Krishnan, Reshmi; Chalana, S. R.; Suresh, S.; Prabhu, Radhakrishna; Mahadevanpillai, V. P.

Abstract

Radio frequency (RF) magnetron sputtered silver incorporated indium oxide thin films were prepared and their structural and morphological properties were studied using micro- Raman spectroscopy, Atomic Force Microscopy (AFM), Field Emission Scanning Electron Microscopy (FESEM) and Energy Dispersive Spectroscopy (EDS). Raman modes corresponding to the cubic bixbyite phase of indium oxide were obtained through micro-Raman spectroscopy. AFM images exhibited dense distribution of grains. Elemental analysis using EDS spectra confirmed the presence of indium, silver and oxygen in the prepared films.

Citation

SILPA SATHEESH, B., KAVITHA, V.S., KRISHNAN, R., CHALANA, S.R., SURESH, S., PRABHU, R. and MAHADEVAN PILLAI, V.P. 2019. Effect of silver incorporation on the structural and morphological characteristics of RF sputtered indium oxide films. IOP conference series: materials science and engineering [online], 499: proceedings of the 4th International conference on structural nano composites (NANOSTRUC 2018), 23-24 May 2018, Berlin, Germany, article number 012001. Available from: https://doi.org/10.1088/1757-899x/499/1/012001

• Journal Article Type: Conference Paper
• Conference Name: 4th International conference on structural nanocomposites (NANOSTRUC 2018)
• Conference Location: Berlin, Germany
• Acceptance Date: Feb 6, 2018
• Online Publication Date: Apr 3, 2019
• Publication Date: Apr 3, 2019
• Deposit Date: May 9, 2019
• Publicly Available Date: May 10, 2019
• Journal: IOP Conference Series: Materials Science and Engineering
• Print ISSN: 1757-8981
• Electronic ISSN: 1757-899X
• Publisher: IOP Publishing
• Peer Reviewed: Peer Reviewed
• Volume: 499
• Article Number: 012001
• DOI: https://doi.org/10.1088/1757-899x/499/1/012001
• Keywords: Radio frequency; Silver; Indium oxide; Thin films; Micro-Raman spectroscopy
• Public URL: https://rgu-repository.worktribe.com/output/242049