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Effect of silver incorporation on the structural and morphological characteristics of RF sputtered indium oxide films.

Silpa Satheesh, B.; Kavitha, V. S.; Krishnan, Reshmi; Chalana, S. R.; Suresh, S.; Prabhu, Radhakrishna; MahadevanPillai, V. P.

Authors

B. Silpa Satheesh

V. S. Kavitha

Reshmi Krishnan

S. R. Chalana

S. Suresh

Radhakrishna Prabhu

V. P. MahadevanPillai



Abstract

Radio frequency (RF) magnetron sputtered silver incorporated indium oxide thin films were prepared and their structural and morphological properties were studied using micro- Raman spectroscopy, Atomic Force Microscopy (AFM), Field Emission Scanning Electron Microscopy (FESEM) and Energy Dispersive Spectroscopy (EDS). Raman modes corresponding to the cubic bixbyite phase of indium oxide were obtained through micro-Raman spectroscopy. AFM images exhibited dense distribution of grains. Elemental analysis using EDS spectra confirmed the presence of indium, silver and oxygen in the prepared films.

Journal Article Type Conference Paper
Publication Date Apr 3, 2019
Journal IOP Conference Series: Materials Science and Engineering
Print ISSN 1757-8981
Electronic ISSN 1757-899X
Publisher IOP Publishing
Peer Reviewed Peer Reviewed
Volume 499
Article Number 012001
Institution Citation SILPA SATHEESH, B., KAVITHA, V.S., KRISHNAN, R., CHALANA, S.R., SURESH, S., PRABHU, R. and MAHADEVAN PILLAI, V.P. 2019. Effect of silver incorporation on the structural and morphological characteristics of RF sputtered indium oxide films. IOP conference series: materials science and engineering [online], 499: proceedings of the 4th International conference on structural nano composites (NANOSTRUC 2018), 23-24 May 2018, Berlin, Germany, article number 012001. Available from: https://doi.org/10.1088/1757-899x/499/1/012001
DOI https://doi.org/10.1088/1757-899x/499/1/012001
Keywords Radio frequency; Silver; Indium oxide; Thin films; Micro-Raman spectroscopy

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