Effect of RF power on the structural and optical properties of zinc sulfide films.
Chalana, S.R.; Sankararaman, S.; Prabhu, Radhakrishna; Pillai, V.P. Mahadevan
Professor Radhakrishna Prabhu firstname.lastname@example.org
V.P. Mahadevan Pillai
Zinc sulfide (ZnS) films were prepared via a radio frequency (RF) magnetron sputtering technique using different RF powers (100, 120, 150, and 180 W), and the effects of the RF power on the structural and optical properties of the films were studied using x-ray diffraction, micro-Raman spectroscopy, atomic force microscopy, ultraviolet-visible spectroscopy, spectroscopic ellipsometry, and laser photoluminescence spectroscopy. It was found that the RF power has an important impact on the predominant phase formation and crystallinity of the ZnS films. The film thickness, refractive index, and film to bulk relative density increase systematically with an increase in the RF power. Among the various RF power values investigated, 150 W was optimal for the growth of highly crystalline ZnS films with a predominance of the cubic phase and enhanced photoluminescence emissions.
CHALANA, S.R., SANKARARAMAN, S., PRABHU, R. and PILLAI, V.P.M. 2017. Effect of RF power on the structural and optical properties of zinc sulfide films. JOM: journal of the Minerals, Metals and Materials Society [online], 69(11), pages 2264-2271. Available from: https://doi.org/10.1007/s11837-017-2459-7
|Journal Article Type||Article|
|Acceptance Date||Jun 27, 2017|
|Online Publication Date||Jul 27, 2017|
|Publication Date||Nov 30, 2017|
|Deposit Date||Nov 30, 2017|
|Publicly Available Date||Jul 28, 2018|
|Journal||JOM Journal of the Minerals, Metals and Materials Society|
|Peer Reviewed||Peer Reviewed|
|Keywords||Zinc sulfide films; Radio frequency; Radio frequency power|
CHALANA 2017 Effect of RF power
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