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Effect of RF power on the structural and optical properties of zinc sulfide films.

Chalana, S.R.; Sankararaman, S.; Prabhu, Radhakrishna; Pillai, V.P. Mahadevan

Authors

S.R. Chalana

S. Sankararaman

Radhakrishna Prabhu

V.P. Mahadevan Pillai

Abstract

Zinc sulfide (ZnS) films were prepared via a radio frequency (RF) magnetron sputtering technique using different RF powers (100, 120, 150, and 180 W), and the effects of the RF power on the structural and optical properties of the films were studied using x-ray diffraction, micro-Raman spectroscopy, atomic force microscopy, ultraviolet-visible spectroscopy, spectroscopic ellipsometry, and laser photoluminescence spectroscopy. It was found that the RF power has an important impact on the predominant phase formation and crystallinity of the ZnS films. The film thickness, refractive index, and film to bulk relative density increase systematically with an increase in the RF power. Among the various RF power values investigated, 150 W was optimal for the growth of highly crystalline ZnS films with a predominance of the cubic phase and enhanced photoluminescence emissions.

Journal Article Type Article
Publication Date Nov 30, 2017
Journal JOM: journal of the Minerals, Metals and Materials Society
Print ISSN 1047-4838
Electronic ISSN 1543-1851
Publisher Springer (part of Springer Nature)
Peer Reviewed Peer Reviewed
Volume 69
Issue 11
Pages 2264-2271
Institution Citation CHALANA, S.R., SANKARARAMAN, S., PRABHU, R. and PILLAI, V.P.M. 2017. Effect of RF power on the structural and optical properties of zinc sulfide films. JOM: journal of the Minerals, Metals and Materials Society [online], 69(11), pages 2264-2271. Available from: https://doi.org/10.1007/s11837-017-2459-7
DOI https://doi.org/10.1007/s11837-017-2459-7
Keywords Zinc sulfide (ZnS)films; Radio frequency (RF); RF power

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