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Effect of electron beam irradiation on structural and optical properties of Cu-doped In2O3 films prepared by RF magnetron sputtering.

Krishnan, R. Reshmi; Sanjeev, Ganesh; Prabhu, Radhakrishna; Pillai, V.P. Mahadevan

Authors

R. Reshmi Krishnan

Ganesh Sanjeev

Radhakrishna Prabhu

V.P. Mahadevan Pillai

Abstract

Undoped and Cu-doped In2O3 films were prepared by radiofrequency magnetron sputtering technique. The effects of Cu doping and high-energy electron beam irradiation on the structural and optical properties of as-prepared films were investigated using techniques such as x-ray diffraction, x-ray photoelectron spectroscopy (XPS), lateral scanning electron microscopic image analysis, energy-dispersive x-ray (EDX) spectroscopy, micro-Raman, and ultraviolet-visible (UV-vis) spectroscopy. Moderate doping of Cu in In2O3 enhanced the intensity of (222) peak, indicating alignment of crystalline grains along . Electron beam irradiation promoted orientation of crystalline grains along in undoped and moderately Cu-doped films. EDX spectroscopic and XPS analyses revealed incorporation of Cu2+ ions in the lattice. The transmittance of Cu-doped films decreased with e-beam irradiation. Systematic reduction of the bandgap energy with increase in Cu doping concentration was seen in unirradiated and electron-beam-irradiated films.

Journal Article Type Article
Publication Date May 31, 2018
Journal JOM: journal of the Minerals, Metals and Materials Society
Print ISSN 1047-4838
Electronic ISSN 1543-1851
Publisher Springer (part of Springer Nature)
Peer Reviewed Peer Reviewed
Volume 70
Issue 5
Pages 739-746
Institution Citation KRISHNAN, R.R., SANJEEV, G., PRABHU, R. and PILLAI, V.P.M. 2018. Effect of electron beam irradiation on structural and optical properties of Cu-doped In2O3 films prepared by RF magnetron sputtering. JOM: journal of the Minerals, Metals and Materials Society [online], 70(5), pages 739-746. Available from: https://doi.org/10.1007/s11837-018-2776-5
DOI https://doi.org/10.1007/s11837-018-2776-5
Keywords Cu-doping; Structural properties; Optical properties; Electron beam irradiation; Films

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