Effect of electron beam irradiation on structural and optical properties of Cu-doped In2O3 films prepared by RF magnetron sputtering.

Krishnan, R. Reshmi; Sanjeev, Ganesh; Prabhu, Radhakrishna; Pillai, V.P. Mahadevan

Abstract

Undoped and Cu-doped In2O3 films were prepared by radiofrequency magnetron sputtering technique. The effects of Cu doping and high-energy electron beam irradiation on the structural and optical properties of as-prepared films were investigated using techniques such as x-ray diffraction, x-ray photoelectron spectroscopy (XPS), lateral scanning electron microscopic image analysis, energy-dispersive x-ray (EDX) spectroscopy, micro-Raman, and ultraviolet-visible (UV-vis) spectroscopy. Moderate doping of Cu in In2O3 enhanced the intensity of (222) peak, indicating alignment of crystalline grains along < 111 > . Electron beam irradiation promoted orientation of crystalline grains along < 111 > in undoped and moderately Cu-doped films. EDX spectroscopic and XPS analyses revealed incorporation of Cu2+ ions in the lattice. The transmittance of Cu-doped films decreased with e-beam irradiation. Systematic reduction of the bandgap energy with an increase in Cu doping concentration was seen in unirradiated and electron-beam-irradiated films.

Citation

KRISHNAN, R.R., SANJEEV, G., PRABHU, R. and PILLAI, V.P.M. 2018. Effect of electron beam irradiation on structural and optical properties of Cu-doped In2O3 films prepared by RF magnetron sputtering. JOM: journal of the Minerals, Metals and Materials Society [online], 70(5), pages 739-746. Available from: https://doi.org/10.1007/s11837-018-2776-5

• Journal Article Type: Article
• Acceptance Date: Feb 7, 2018
• Online Publication Date: Feb 28, 2018
• Publication Date: May 31, 2018
• Deposit Date: May 4, 2018
• Publicly Available Date: Mar 1, 2019
• Journal: JOM: journal of the Minerals, Metals and Materials Society
• Print ISSN: 1047-4838
• Electronic ISSN: 1543-1851
• Publisher: Springer
• Peer Reviewed: Peer Reviewed
• Volume: 70
• Issue: 5
• Pages: 739-746
• DOI: https://doi.org/10.1007/s11837-018-2776-5
• Keywords: Cu-doping; Structural properties; Optical properties; Electron beam irradiation; Films
• Public URL: http://hdl.handle.net/10059/2901