Potential of silicon nanowires structures as nanoscale piezoresistors in mechanical sensors.

Messina, M.; Njuguna, J.

Abstract

This paper presents the design of a single square millimeter 3-axial accelerometer for bio-mechanics measurements that exploit the potential of silicon nanowires structures as nanoscale piezoresistors. The main requirements of this application are miniaturization and high measurement accuracy. Nanowires as nanoscale piezoresistive devices have been chosen as sensing element, due to their high sensitivity and miniaturization achievable. By exploiting the electro-mechanical features of nanowires as nanoscale piezoresistors, the nominal sensor sensitivity is overall boosted by more than 30 times. This approach allows significant higher accuracy and resolution with smaller sensing element in comparison with conventional devices without the need of signal amplification.

Citation

MESSINA, M. and NJUGUNA, J. 2012. Potential of silicon nanowires structures as nanoscale piezoresistors in mechanical sensors. IOP conference series: materials science and engineering [online], 40(1): proceedings of 2012 international conference on Structural nano composites (NANOSTRUC 2012), 2-4 July 2012, Cranfield, UK, article 012038. Available from: https://doi.org/10.1088/1757-899X/40/1/012038

• Journal Article Type: Conference Paper
• Conference Name: 2012 international conference on Structural nano composites (NANOSTRUC 2012)
• Conference Location: Cranfield, UK
• Acceptance Date: Aug 9, 2012
• Online Publication Date: Sep 13, 2012
• Publication Date: Dec 31, 2012
• Deposit Date: Dec 15, 2014
• Publicly Available Date: Dec 15, 2014
• Journal: IOP conference series: materials science and engineering
• Print ISSN: 1757-8981
• Electronic ISSN: 1757-899X
• Publisher: IOP Publishing
• Peer Reviewed: Peer Reviewed
• Volume: 40
• Issue: 1
• Article Number: 012038
• DOI: https://doi.org/10.1088/1757-899X/40/1/012038
• Public URL: http://hdl.handle.net/10059/1100