Indium tin oxide thin film preparation and property relationship for humidity sensing: a review.

Rajendran, Vinooth; Prathuru, Anil; Fernandez, Carlos; Sujatha, Dhavamani; Panda, Subhendu K.; Faisal, Nadimul Haque

Abstract

This review aims to present a critical overview of indium tin oxide (ITO) thin film preparation methods, structure–property relationship and its application in humidity sensing. A range of passive and active humidity sensors with thin films (based on metal oxides) detect humidity. ITO thin film has advantageous properties, such as low resistivity and high stability, making it highly suitable for humidity sensing applications. ITO thin film has shown an efficient level of humidity sensing and a compatible size of humidity sensor can monitor the interface conditions' humidity. So far, the application of ITO thin film for humidity measurement has yet to be explored at commercial scale, specifically in the detection of lower environmental humidity range (below 5% relative humidity (RH)). The research reveals a gap in improving ITO thin film properties with an optimal range of preparation conditions. The research opportunities in the preparation, properties, characteristics and efficient humidity sensitivity of ITO thin film are reviewed in this work.

Citation

RAJENDRAN, V., PRATHURU, A., FERNANDEZ, C., SUJATHA, D., PANDA, S.K. and FAISAL, N.H. 2024. Indium tin oxide thin film preparation and property relationship for humidity sensing: a review. Engineering reports [online], 6(3), article ID e12836. Available from: https://doi.org/10.1002/eng2.12836

• Journal Article Type: Review
• Acceptance Date: Dec 14, 2023
• Online Publication Date: Jan 2, 2024
• Publication Date: Mar 31, 2024
• Deposit Date: Jan 5, 2024
• Publicly Available Date: Jan 5, 2024
• Journal: Engineering reports
• Electronic ISSN: 2577-8196
• Publisher: Wiley Open Access
• Peer Reviewed: Peer Reviewed
• Volume: 6
• Issue: 3
• Article Number: e12836
• DOI: https://doi.org/10.1002/eng2.12836
• Keywords: Indium tin oxide; Thin films; Material properties; Humidity sensing; Thickness; Annealing temperature
• Public URL: https://rgu-repository.worktribe.com/output/1987457